[labnetwork] Dry pumps on ALD systems?

[Mac Hathaway]

Hello Folks,

I'm wondering: how many of you have tried a dry pump on your ALD system?

If you have, how did it work out?

If you could supply the following details, that would be great:

ALD system model;

Dry pump model and CFM;

How long it's been running that way;

Any issues you've run in to.

For background, we have long been working under the assumption that, due 
to the reactive nature of the ALD precursors, and the abrasive nature of 
the effluent, PFPE-base wet pumps are the way to go.  However, we grow 
tired of dealing with pump oil and associated issues, and we're using 
dry pumps successfully elsewhere in the fab...

Thanks!

Mac


-- 

Mac Hathaway

Senior Process and Systems Engineer

Harvard Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA02138

617-495-9012

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