[labnetwork] Dry pumps on ALD systems?

[Gila,Brent P]

Hello Mac,

We have been running an Edwards QDP80 dry pump (56CFM, 7mTorr) on our 
Fiji 200 ALD for several years now, no issues.  The Fiji 200 came with a 
different manufacturer dry pump and we switched over to this when it 
died.  We did not have to change any of process recipes, the Edwards 
QDP80 matched up well with the original pump.

The Edwards QDP80 has been our go to pump for many applications and 
there are a lot of these pumps on the secondary/remanufactured market.

Best Regards,
Brent
-- 
Brent P. Gila, PhD.
Associate Director, Research Service Centers
University of Florida
1041 Center Drive
Gainesville, Florida 32611
Tel:352-273-2245,  Fax:352-846-2877
email: bgila at ufl.edu

On 7/8/2021 1:56 PM, Mac Hathaway wrote:
> *[External Email]*
>
> Hello Folks,
>
> I'm wondering: how many of you have tried a dry pump on your ALD system?
>
> If you have, how did it work out?
>
> If you could supply the following details, that would be great:
>
> ALD system model;
>
> Dry pump model and CFM;
>
> How long it's been running that way;
>
> Any issues you've run in to.
>
> For background, we have long been working under the assumption that, 
> due to the reactive nature of the ALD precursors, and the abrasive 
> nature of the effluent, PFPE-base wet pumps are the way to go.  
> However, we grow tired of dealing with pump oil and associated issues, 
> and we're using dry pumps successfully elsewhere in the fab...
>
> Thanks!
>
> Mac
>
>
> -- 
>
> Mac Hathaway
>
> Senior Process and Systems Engineer
>
> Harvard Center for Nanoscale Systems
>
> 11 Oxford St.
>
> Cambridge, MA02138
>
> 617-495-9012
>
>
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