[labnetwork] Branson S3100 plasma asher repair

[Kevin M McPeak]

Dear Colleagues,

We have an old Branson S3100 plasma asher in the LSU nanofab. We believe the matching network is in need of repair. The power supply is stable when connected to a dummy load but gives unstable power output when connected to the matching network/chamber.

Does anyone on the list know of a reliable 3rd party that works on these old tools? Thanks!

Regards,
Kevin


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