[labnetwork] Plasmatherm Apex ICP High Temperature Operation

[Paolini, Steven]

Bruce,
  One way to measure the actual wafer temp is with a T/C wafer (Sensarray). These are designed with cemented T/C junctions on the wafer itself. The leads are encapsulated in a plastic ribbon which is designed to cross an O ring. You will find that the wafer will sit at a much lower temperature than the chuck under vacuum since there is no surrounding air to allow for convection. I would recommend testing the temperature with the wafer unclamped. Clamped, and clamped with He backing. You may be surprised at the results!
  Equipment Dood


Steve Paolini
Principal Equipment Engineer
Harvard University Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA 02138
617- 496- 9816
spaolini at cns.fas.harvard.edu
www.cns.fas.harvard.edu

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Bruce Tolleson
Sent: Wednesday, June 23, 2021 9:14 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Plasmatherm Apex ICP High Temperature Operation

Dear Labnetwork,
  Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C.  We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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