[labnetwork] Plasmatherm Apex ICP High Temperature Operation

[Jeremy Clark]

The trick with the dots is that you need to press them hard and flat to 
the wafer, as the vacuum tries to pull them up and away from the 
surface, thus defeating the purpose of measuring the temperature of a 
surface.

Also leave the wafer in there for a few minutes- or wait /and/ don't 
wait with separate dots and see the difference!


Jeremy Clark

Cornell Nanoscale Facility

On 6/23/21 1:16 PM, LaFleur, David W wrote:
>
> Hi Bruce
>
> There are 2 ways I know of, an inexpensive way and an expensive way. 
> The inexpensive way is to use thermal dots sold here:
>
> https://www.mcmaster.com/temperature-indicating-dots/ 
> <https://www.mcmaster.com/temperature-indicating-dots/>
>
> Expensive way is using  SensArray.
>
> https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management 
> <https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management>.
>
> Regards,
>
> Dave LaFleur
>
> Harvard University
>
> CNS
>
> *From: *"labnetwork-bounces at mtl.mit.edu" 
> <labnetwork-bounces at mtl.mit.edu> on behalf of Bruce Tolleson 
> <betemc at rit.edu>
> *Date: *Wednesday, June 23, 2021 at 11:42 AM
> *To: *"labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
> *Subject: *[labnetwork] Plasmatherm Apex ICP High Temperature Operation
>
> Dear Labnetwork,
>
>   Our Plasmatherm Apex ICP has the high temperature option installed 
> to run as high as 200°C.  We are trying to determine the actual 
> temperature of the lower electrode to substrate contact. The display 
> temperature verses actual temperature has an offset and we are trying 
> to determine what that offset is. Has anyone else been able to measure 
> this?
>
> Thank you,
>
> Bruce E. Tolleson
>
> Rochester Institute of Technology
>
> 82  Lomb Memorial Drive, Bldg 17-2627
>
> Rochester, NY 14623-5604
>
> (585) 478-3836
>
> http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg
>
>
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