[labnetwork] Gas Purity Grade for RIE

[Dr. Loïk Gence]

Hi Keith,

Thanks for your comment.

that would be great. However, a purifier would represent additional 
costs of equipment and maintenance that seems expensive.

We are talking about a small university cleanroom, and this will be the 
first RIE in Chile.

The matter is mainly for SF6, Cl2, BCl3, CHF3, and CF4. I guess, 
purification of BCl3 and Cl2 is not that easy.


Best,

Loïk


Le 13/05/2021 à 20:08, Keith Barnes a écrit :
> Why not use a purifier?
>
> Sent from my iPhone
>
>> On May 13, 2021, at 4:38 PM, Dr. Loïk Gence <loik.gence at fis.puc.cl> wrote:
>>
>> Hi All,
>>
>> I hope you are all fine and safe.
>>
>> We are planning the installation of our first RIE with chlorine and Fluorine chemistries.
>>
>> I was wondering, what are purity grade of the gases you are using.  Always electronic grade, 5.0 grade or above ?  To avoid potential contamination of the gas lines, chamber, etc...  of course, choosing the best purity available is a solution. However, thinking about the cost/utility for standard etching processes, and with potential problem of local availability of high grade, what grade range would you consider safe for the equipment and standard processes?
>>
>> Thanks in advance for your comment.
>>
>>
>> Best,
>>
>> Loïk
>>
>>