[labnetwork] Gas Purity Grade for RIE

[Morrison, Richard H., Jr]

HI,

I would just purchase the best purity gas you can in your area, most will be between grade 3 and grade 5, the BCL3 is a liquid so make sure you heat the lines and use the proper regulator in the gas cabinet to deliver the low pressure gas.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461



-----Original Message-----
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Dr. Loïk Gence
Sent: Thursday, May 13, 2021 4:16 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Gas Purity Grade for RIE

Hi All,

I hope you are all fine and safe.

We are planning the installation of our first RIE with chlorine and Fluorine chemistries.

I was wondering, what are purity grade of the gases you are using. Always electronic grade, 5.0 grade or above ?  To avoid potential contamination of the gas lines, chamber, etc...  of course, choosing the best purity available is a solution. However, thinking about the cost/utility for standard etching processes, and with potential problem of local availability of high grade, what grade range would you consider safe for the equipment and standard processes?

Thanks in advance for your comment.


Best,

Loïk



--

Dr. Loïk Gence
Assistant Professor
Instituto de Física
Pontificia Universidad Católica de Chile Avda. Vicuña Mackenna 4860, CP 7820436 Santiago
Lab: +56 95504 9648


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