[labnetwork] Gas Purity Grade for RIE

[Srinivasa Reddy]

Dear Loik,

Depending upon the application you can choose the purity.
Mostly we are using 5N (99.999%), or 4N5 (99.995) purity gases.
Linde and Mathison can supply the cylinders  (bottles)

Thanks & Regards
Srinivasa Reddy Kuppireddi
Project Manager
Center for NEMS & Nano Photonics (CNNP)
ESB 225, Dept. of Electrical Engineering
Indian Institute of Technology(IIT) Madras
Chennai-600036, Indian
+91 44 2257 5493 (O)
+91 789 326 8010(M)


On Fri, May 14, 2021 at 5:10 AM Dr. Loïk Gence <loik.gence at fis.puc.cl>
wrote:

> Hi All,
>
> I hope you are all fine and safe.
>
> We are planning the installation of our first RIE with chlorine and
> Fluorine chemistries.
>
> I was wondering, what are purity grade of the gases you are using.
> Always electronic grade, 5.0 grade or above ?  To avoid potential
> contamination of the gas lines, chamber, etc...  of course, choosing the
> best purity available is a solution. However, thinking about the
> cost/utility for standard etching processes, and with potential problem
> of local availability of high grade, what grade range would you consider
> safe for the equipment and standard processes?
>
> Thanks in advance for your comment.
>
>
> Best,
>
> Loïk
>
>
>
> --
>
> Dr. Loïk Gence
> Assistant Professor
> Instituto de Física
> Pontificia Universidad Católica de Chile
> Avda. Vicuña Mackenna 4860,
> CP 7820436 Santiago
> Lab: +56 95504 9648
>
>
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