[labnetwork] Sapphire dicing

[Shimon Eliav]

Hi Natalia,
We use Blade Dicing.
System: ADT Provectus 7100
Blade: ADT Resinoid
Speed: 0.4mm/sec
Every Pass: 140 µm deep
Regards,
Shimon

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Natalia Pankratova
Sent: Friday, 14 May 2021 14:25
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Sapphire dicing

Dear All,

Can you please share your experience on dicing sapphire wafers? Blade dicing or laser? Do you have a favorite dicing brand/model?

Thank you in advance!

Best regards,

Natalia Pankratova.
Alice&Bob
Nanofabrication engineer
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