[labnetwork] Yellow filters for litho room: what specs are out there?

[Salzmann, Jeffrey]

Shane,

You might wish to consider using LED lighting, you can get a “no blue” light (it looks like white light!) that has none of the problematic wavelengths. I am not familiar with vendors but I’ve tested them in two different photo bay (365 and 405 nm) and measured zero intensity.

Regards,
Jeff


Jeff Salzmann
Senior Research Engineer
Advanced Materials Technology Group

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Jeffrey.Salzmann at integer.net<mailto:Jeffrey.Salzmann at integer.net>
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Xin (Shane) GUO
Sent: Thursday, May 27, 2021 10:03 AM
To: Beaudoin, Mario <beaudoin at physics.ubc.ca>
Cc: labnetwork at mtl.mit.edu; fblais at mecart.com; david Arrouart <darrouart at mecart.com>; Michelakis, Kostis <kostis.michelakis at ubc.ca>
Subject: Re: [labnetwork] Yellow filters for litho room: what specs are out there?


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Hello Mario,

I saw your past post regarding amber UV filter films for the cleanroom. I am in a similar situation looking for UV filter films for our cleanroom lights. Lithoprotect is also what I have found so far. I am wondering if you have identified suppliers from North America and can share such information with me.

Best


Shane Guo, PhD, P.Eng., PMP
Lab Manager
York MicroFab Facilities (YMF)/ESSE
C 289-588-6605
T 416-736-2100 ext 44160
sguo18 at yorku.ca<mailto:sguo18 at yorku.ca> | lassonde.yorku.ca<http://lassonde.yorku.ca/>
Lassonde School of Engineering | York University
RM037, Bergeron Building
4700 Keele Street Toronto ON, Canada M3J 1P3

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On Thu, Dec 20, 2018 at 8:09 PM Beaudoin, Mario <beaudoin at physics.ubc.ca<mailto:beaudoin at physics.ubc.ca>> wrote:

Dear Labnetworks community,

I'm in the process of renovating our cleanroom and want yellow filters that meet the specs of Lithoprotect, specifically, I want way less than 1% transmission below 500nm.  Lithoprotect (see link below) claims less than 0.001% transmission below about 475nm.  In our old cleanroom, we used to have traditional 1% yellow windows that turned out to be inadequate for our maskless lithography system.

https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf

Does anyone know of a US supplier that offers similar product?  On the other hand, does anyone know of products that are not quite as performing but still offer say 0.01% transmission below 500nm?  We will be using 405nm and 365nm light with a traditional mask aligner and a maskless system.  We typically use AZ 5214E-IR and nLoF 2020 resists for down to 1um features; some users still use Shipley 1813 and we have another set of groups using SU-8 resists.  We're not committed to any supplier but do require tight performance.

I'm cc'ing our cleanroom manufacturer engineers in this thread.

Regards,

Mario
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