[labnetwork] PR bubbles where exposed

[Salzmann, Jeffrey]

Joe,

What is the humidity of the photo area?

Jeff


Jeff Salzmann
Senior Research Engineer
Advanced Materials Technology Group

Integer*
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Jeffrey.Salzmann at integer.net<mailto:Jeffrey.Salzmann at integer.net>
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Maduzia, Joseph Walter
Sent: Thursday, November 4, 2021 9:59 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] PR bubbles where exposed


CAUTION: This email originated from outside of the organization. Do not click links or open attachments unless you recognize the sender and know the content is safe.
Hello All!

Thank you again for all your feedback on SiO2 etch around Al. It has been very helpful and we are moving down multiple paths suggested via the Lab Network to try to solve the issue. More to come once we solve it!

I have another issue I was hoping for feedback on. We have bubbling in our PR (SPR-220-4.5) (pos tone) that we haven’t been able to track the source of. It only bubbles during exposure and only where it is exposed. Unexposed areas are unaffected. I’ve attached some images of the bubbling where you can see the exposed (lighter) and unexposed (darker) areas. The bubbles are visible to the naked eye. The wafer is silicon w a dry thermally grown SiO2 surface. We typically expose via EV620 mask aligner with Vac+HardContact. However, even in a flood exposure with the mask just set lightly down it still bubbles. Without a mask there are also bubbles randomly distributed across the wafer, but they don’t get stuck to the mask so they don’t pop. We tried various pre-bakes, HMDS coat vs not, piranha treat vs not. In the past these bubbles show up, we trial and error to get rid of them and suddenly they disappear. Our process, although seemingly repeatable, does not yield repeatable results.

Thank You,
JOE MADUZIA
MNMS Laboratory Specialist

The Grainger College of Engineering
Mechanical Science and Engineering

2239 Sidney Lu Mechanical Engineering Bldg
1206 W. Green
Urbana, IL 61801
217.244.6302 | jmaduzi2 at illinois.edu<mailto:jmaduzi2 at illinois.edu>
https://cleanroom.mechse.illinois.edu/<https://cleanroom.mechse.illinois.edu/>

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