[labnetwork] RIE through Silicon

[Chang, Long]

Hi Guys,

I have an Oxford RIE with backside Helium. I want to etch through the silicon wafer (380um thick). The largest pattern is a 1mm diameter circle. My plan is to ride the 4” sample wafer on a 4" carrier wafer with PR. Does anyone have a good solution to this problem?

Thanks,
Long

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