[labnetwork] GILD / PLIE capabilities?

Wed Apr 13 15:48:42 EDT 2022

Hi,

Does anyone have (or know of a group who has) Gas Immersion Laser Doping
(GILD) or Pulse Laser Induced Epitaxy (PLIE) capabilities for implanting a
high concentration of Boron (1e21/cm^3) into the top ~200 nm of a bare Si
wafer?

Wafer size isn't important.

Thanks much,

Brian K. Olmsted
Associate Director of Laboratory Operations
University of Minnesota | MNC
www.mnc.umn.edu
612.626.3287
olms0025 at umn.edu
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