[labnetwork] Refill ALD Cylinders

[Matthew Moneck]

Hi Tony,



We have had good experience refilling cylinders with Strem.  As Eric
mentioned, there is a cleaning fee that can make the cost of a new cylinder
either similar or cheaper.  However, we were asked by our EHS Office to
pursue the refill route because as it turned out, it was more expensive to
properly dispose of used cylinders with a hazardous waste vendor than it is
to clean and refill.



Best Regards,


Matt



--

*Matthew T. Moneck, Ph.D*

Executive Director, Claire & John Bertucci Nanotechnology Laboratory

Electrical & Computer Engineering | Carnegie Mellon University

5000 Forbes Avenue, Pittsburgh, PA 15213-3890

Phone:  412-268-5430

ece.cmu.edu <http://www.ece.cmu.edu/>

nanofab.ece.cmu.edu <http://www.nanofab.ece.cmu.edu/>



*From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Eric
Deguns
*Sent:* Thursday, April 21, 2022 4:12 PM
*To:* Tony L Olsen <tony.olsen at utah.edu>
*Cc:* Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
*Subject:* Re: [labnetwork] Refill ALD Cylinders



Hi Tony,



Most of the standard ALD precursors vendors will "clean and refill"
cylinders for you - but they will charge you a cleaning fee.  By this, I
mean - Strem, Air Liquide, Gelest, etc. Sometimes this cleaning fee can be
quite expensive which makes it more cost effective to purchase new ones.



If you have personnel in the Chemistry department who can refill these
cylinders in an appropriate glovebox, refilling on top of the same material
is also possible.  For example, filling TMA into a empty cylinder which
previously held TMA. Proper training and equipment is key here.



For some applications, you many not want to do a refill depending on the
precursor "stickiness" or it's purity requirements.



Hope that helps.



Best,



Eric



P.S. My work contact is Edeguns at veeco.com





Sent from my iPhone



On Apr 21, 2022, at 4:02 PM, Tony L Olsen <tony.olsen at utah.edu> wrote:



Does anybody have a source to re-use/refill ALD cylinders?  We have a
number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It seems a waste to
dispose of them, if they can be re-used.  I’ve found a couple companies
that supposedly provide this service, but they have not responded to my
inquiries.  Hoping there is a good track record with someone out there.



tonyO





Tony Olsen

Nanofab Cleanroom Supervisor/Process Engineer

University of Utah

36 S Wasatch Drive, Suite 2500

Salt Lake City, UT  84112

801-587-0651

www.nanofab.utah.edu





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