[labnetwork] Refill ALD Cylinders

[Gila,Brent P]

We have been using Strem for many years and the cylinder refill program 
has been great.

The one thing you may want to be aware of is the additional shipping 
charges for TMA cylinders (pyrophoric hazard).  For us, the additional 
shipping charge for TMA plus the price of the cylinder cleaning is more 
than just purchasing a new cylinder of TMA.  The cylinder cleaning is 
cost effective for many other precursors that are not pyrophoric.

As budgets get tight, these little things can add up.

Best Regards,
Brent
-- 
Brent P. Gila, PhD.
Associate Director, Research Service Centers
University of Florida
1041 Center Drive
Gainesville, Florida 32611
Tel:352-273-2245,  Fax:352-846-2877
email: bgila at ufl.edu



On 4/22/2022 7:48 AM, Bruce Tolleson wrote:
> *[External Email]*
>
> Hi Tony,
>
>   We use Strem Chemical to clean and refill all of our precursors. 
> They are easy to work with and turn them around in short order.
>
> Strem has a Cylinder Refill form on their web site with the 
> instructions and phone numbers.
>
>   I hope this helps,
>
> Bruce E. Tolleson
>
> Rochester Institute of Technology
>
> 82  Lomb Memorial Drive, Bldg 17-2627
>
> Rochester, NY 14623-5604
>
> (315) 573-6263
>
> http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of 
> *Eric Deguns
> *Sent:* Thursday, April 21, 2022 4:12 PM
> *To:* Tony L Olsen <tony.olsen at utah.edu>
> *Cc:* Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Refill ALD Cylinders
>
> Hi Tony,
>
> Most of the standard ALD precursors vendors will "clean and refill" 
> cylinders for you - but they will charge you a cleaning fee.  By this, 
> I mean - Strem, Air Liquide, Gelest, etc. Sometimes this cleaning fee 
> can be quite expensive which makes it more cost effective to purchase 
> new ones.
>
> If you have personnel in the Chemistry department who can refill these 
> cylinders in an appropriate glovebox, refilling on top of the same 
> material is also possible.  For example, filling TMA into a empty 
> cylinder which previously held TMA. Proper training and equipment is 
> key here.
>
> For some applications, you many not want to do a refill depending on 
> the precursor "stickiness" or it's purity requirements.
>
> Hope that helps.
>
> Best,
>
> Eric
>
> P.S. My work contact is Edeguns at veeco.com
>
> Sent from my iPhone
>
>
>
>     On Apr 21, 2022, at 4:02 PM, Tony L Olsen <tony.olsen at utah.edu> wrote:
>
>     
>
>     Does anybody have a source to re-use/refill ALD cylinders?  We
>     have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It
>     seems a waste to dispose of them, if they can be re-used. I’ve
>     found a couple companies that supposedly provide this service, but
>     they have not responded to my inquiries.  Hoping there is a good
>     track record with someone out there.
>
>     tonyO
>
>     Tony Olsen
>
>     Nanofab Cleanroom Supervisor/Process Engineer
>
>     University of Utah
>
>     36 S Wasatch Drive, Suite 2500
>
>     Salt Lake City, UT  84112
>
>     801-587-0651
>
>     www.nanofab.utah.edu
>     <https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.utah.edu&d=DwMGaQ&c=sJ6xIWYx-zLMB3EPkvcnVg&r=gl_2fLZA_-_JfH_dOmx7ug&m=PxtSg_vKsudG04NMtRL0a1394ecB_uipPM5cTkgOUE-GwS2YKEKlHPFNH5j5nsE8&s=sSECLI_hFYL9z4MswaIMG_2g6iDLUzknoIQh6ZgkEJI&e=>
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