[labnetwork] Regarding : Aluminium E-Beam Evaporation
Gila,Brent P
bgila at ufl.edu
Tue Aug 30 09:14:08 EDT 2022
Agreed, carbon spacer under the crucible for Al is the way to go.
Brent
On 8/29/2022 9:45 PM, Ryan Rivers wrote:
> *[External Email]*
>
> The best way around the aluminum crucible shattering problem is to use
> a FABMATE crucible, but also to use a carbon spacer under your liner.
> A 1/8" thick carbon disk works in a pinch, you can get fancier with
> some machine shop time. We use them in all our ebeam tools the Marvell
> NanoLab and I've only seen a handful of crucible liners shatter from
> thermal load in the last decade.
>
> Primary cause of crucible liner breaks are incomplete thermal contact
> on one side of the crucible. When you're pouring too much heat in to
> make up for that contact, one side goes red hot, the other never gets
> there. Thermal expansion drives the rest. The spacer prevents your
> liner from cooling through the sides and only cools at the bottom. You
> heat with less joules in, so less shock. Lets your entire crucible
> heat more evenly and more readily stabilize through the problematic
> regions of melt formation.
>
> -Ryan
>
> On Mon, Aug 29, 2022 at 4:47 PM Michael Yakimov <yakimom at sunypoly.edu>
> wrote:
>
> One of things which may hinder Al deposition from carbon crucible
> is Aluminum carbide formation on the surface. It will show up as
> yellow stuff on the surface after venting, eventually decomposing
> in the air.
> It is a part of tribal knowledge for me; I couldn't find a good
> reference in 5 minutes. there is mention of the effect here:
> https://link.springer.com/article/10.1007/BF00792405
> <https://nam10.safelinks.protection.outlook.com/?url=https%3A%2F%2Flink.springer.com%2Farticle%2F10.1007%2FBF00792405&data=05%7C01%7Cbgila%40ufl.edu%7C103b23e8e6b649ce6f1408da8a8062ed%7C0d4da0f84a314d76ace60a62331e1b84%7C0%7C0%7C637974582006537929%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=RkT7NgIkEqyZJbAStGwDnIunHNtJNIQq9pI4M9nD2fw%3D&reserved=0>
> <https://nam10.safelinks.protection.outlook.com/?url=https%3A%2F%2Flink.springer.com%2Farticle%2F10.1007%2FBF00792405&data=05%7C01%7Cbgila%40ufl.edu%7C103b23e8e6b649ce6f1408da8a8062ed%7C0d4da0f84a314d76ace60a62331e1b84%7C0%7C0%7C637974582006537929%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=RkT7NgIkEqyZJbAStGwDnIunHNtJNIQq9pI4M9nD2fw%3D&reserved=0>
>
> Industrial operation of vacuum aluminum evaporators made in
> refractory compound alloys - SpringerLink
> <https://nam10.safelinks.protection.outlook.com/?url=https%3A%2F%2Flink.springer.com%2Farticle%2F10.1007%2FBF00792405&data=05%7C01%7Cbgila%40ufl.edu%7C103b23e8e6b649ce6f1408da8a8062ed%7C0d4da0f84a314d76ace60a62331e1b84%7C0%7C0%7C637974582006537929%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=RkT7NgIkEqyZJbAStGwDnIunHNtJNIQq9pI4M9nD2fw%3D&reserved=0>
> Vaporizing elements of various types and sizes are being produced
> from a TiB2-TiC alloy in the Special Design and Technology
> Department of the Institute of Materials Science, Academy of
> Sciences of the Ukrainian SSR, and widely used in vacuum
> deposition plants for the application of aluminum coatings to
> glass, plastics, fabrics, paper, metals, and film and other
> coiling materials. The ...
> link.springer.com
> <https://nam10.safelinks.protection.outlook.com/?url=http%3A%2F%2Flink.springer.com%2F&data=05%7C01%7Cbgila%40ufl.edu%7C103b23e8e6b649ce6f1408da8a8062ed%7C0d4da0f84a314d76ace60a62331e1b84%7C0%7C0%7C637974582006537929%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=vHhj0YL8AsAH1fPcerZtk%2B7MRj7Qn5kNJ%2BZRuYQjzvs%3D&reserved=0>
>
>
>
>
> ------------------------------------------------------------------------
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of
> Zhichao Wang <zhichaow at udel.edu>
> *Sent:* Monday, August 29, 2022 12:14 PM
> *To:* Chandan H B <chandanachar95 at gmail.com>
> *Cc:* labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Regarding : Aluminium E-Beam Evaporation
> Chandan,
>
> We use a pattern beam with the pattern sweeping/rotating
> constantly during the deposition, and a fabmate crucible. The rest
> of the parameters are pretty similar. The highest deposition rate
> we've tried is 15 Angstrom/s.
>
> --
> Chao
>
> On Mon, Aug 29, 2022 at 8:07 AM Chandan H B
> <chandanachar95 at gmail.com> wrote:
>
> Dear Lab network community,
>
> We are currently facing an issue in the deposition of
> Aluminium in one of our Electron beam evaporation tools, we
> tried intermetallic, fab mate, copper, glassy coated
> graphite, and graphite crucibles for the evaporation. It seems
> that none of them are working out.
> We see crucible gets broken at the initial deposition quite often.
>
> Are we missing out on any parameters unchecked?
> Kindly recommend us a few parameters or solutions for the same.
>
> Any suggestions/Inputs are highly appreciated.
> Thanks in advance!
>
> Regards,
> CHANDAN H B
> THIN FILM ENGINEER
>
> P.S: Here are a few parameters that are provided to the tool.
> Power: 10KW
> Voltage: 10KV constant
> Current: Variable
> Rise1 & Soak1: 5min & 1min /8min & 2min
> Rise1 Power: 4% (for intermetallic crucible)
> Rise2 & Soak2: 5min & 1min /8min & 2min
> Rise2 Power: 8% (for intermetallic crucible)
> Ramp down: 5min
> Rate of deposition: 0.1nm/sec
> Beam Pattern: Spot Beam at the center of the crucible
> Crucible Volume: 20cc
> Material fill %: As recommended 67-75%
>
>
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