[labnetwork] Diffusion ZnO on InAs in forming gas

[Michael Yakimov]

GaAs starts losing Arsenic at around 400C, InAs is probably the same thing. It may not be a huge loss, but furnace will not be MOS clean ever.
I wonder what kind of ZnO source you are talking. Pure ZnO may be a problem. Spin on glass with Zn dopant may be a better idea both for Zn escape and As containment, especially if wafwr backside is taken care of as well.

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Brian K. Olmsted <olms0025 at umn.edu>
Sent: Tuesday, August 30, 2022 5:13:08 PM
To: Steffen, Paul <steffen.8 at osu.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Diffusion ZnO on InAs in forming gas

Hi Paul,

Others may want to add to this with their experiences, but I have used ZnO in a retort furnace using a forming gas environment and the net result was Zn contamination so bad and persistent that the furnace was decommissioned and could not be used anymore.

Thanks,

Brian

On Tue, Aug 30, 2022 at 2:36 PM Steffen, Paul <steffen.8 at osu.edu<mailto:steffen.8 at osu.edu>> wrote:

Lab Network Community,



We have a request to diffuse ZnO on InAs in forming gas at 450 C for 1 hour in a horizontal furnace tube. Does anyone have experience with these materials in forming gas? Would the forming gas react with either material leading to decomposition and contamination of the furnace tube with Zn or As?



Thanks.



-Paul





[The Ohio State University]
Paul Steffen
Lab Manager
Institute for Materials Research Nanotech West Lab
100 Science Village, 1381 Kinnear Road, Columbus, OH 43212
614-688-3546 Office / 614-688-3379 Fax
steffen.8 at osu.edu<mailto:steffen.8 at osu.edu> nanotech.osu.edu<http://nanotech.osu.edu>



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