[labnetwork] Regarding : Aluminium E-Beam Evaporation

[Gila,Brent P]

E-beam deposition and best practices should be a round table discussion 
at the next UGIM.

On 8/31/2022 10:01 AM, Shimon Eliav wrote:
> *[External Email]*
>
> Hi Chandan,
>
> Here is my two cents to this nice discussion.
>
> I agree with Ryan, Brent and Ted: the simple spacer does the job. 
> After some trials, here at Hebrew University we use intermetallic 
> crucibles with an special format manufactured by Angstrom Engineering 
> that mimics the spacer effect. Here is the description:
>
> It is quite expensive, 245$ each, but lasts for many evaporations. We 
> also have slow heat up and cooling down ramps.
>
> Once I saw at Princeton a simple thermal evaporator using a Graphite 
> boat, also from Angstrom. The trick they use there is to consume all 
> the Al in the boat in the end of the evaporation. Seems to work nicely.
>
> Please find attached the summary of all answers.
>
> Regards,
>
> Shimon
>
> Hebrew University of Jerusalem
>
> *From:*labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of 
> *Chandan H B
> *Sent:* Monday, 29 August 2022 9:04
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Regarding : Aluminium E-Beam Evaporation
>
> Dear Lab network community,
>
> We are currently facing an issue in the deposition of Aluminium in one 
> of our Electron beam evaporation tools, we tried intermetallic, fab 
> mate, copper, glassy coated graphite, and graphite crucibles for the 
> evaporation. It seems that none of them are working out.
>
> We see crucible gets broken at the initial deposition quite often.
>
> Are we missing out on any parameters unchecked?
>
> Kindly recommend us a few parameters or solutions for the same.
>
> Any suggestions/Inputs are highly appreciated.
>
> Thanks in advance!
>
> Regards,
>
> CHANDAN H B
>
> THIN FILM ENGINEER
>
> P.S: Here are a few parameters that are provided to the tool.
>
> Power: 10KW
>
> Voltage: 10KV constant
>
> Current: Variable
>
> Rise1 & Soak1: 5min & 1min /8min & 2min
>
> Rise1 Power: 4% (for intermetallic crucible)
>
> Rise2 & Soak2: 5min & 1min /8min & 2min
>
> Rise2 Power: 8% (for intermetallic crucible)
>
> Ramp down: 5min
>
> Rate of deposition: 0.1nm/sec
>
> Beam Pattern: Spot Beam at the center of the crucible
>
> Crucible Volume: 20cc
>
> Material fill %: As recommended 67-75%
>
>
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