[labnetwork] BCL3 question

Fri Dec 2 02:56:23 EST 2022

Hi Rick,
This is my “2 cents” for the discussion:

  *   We have Cl2, BCl3 and HBr etching processes running for 13 years
  *   The first set of cylinders were exchanged after 5 years of use
  *   The second set of cylinders is in use for 8 years and running
  *   Although we only order small cylinders (3 to 5 liters), they last for years
  *   We use to retire our cylinders when their hydrostatic test expires
  *   Only for B2H6 we observe its gas expiration date
Regards,
Shimon

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Morrison, Richard H., Jr
Sent: Thursday, 1 December 2022 23:47
To: bill_flounders at berkeley.edu; deonc69 at illinois.edu
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] BCL3 question

Thanks Everyone for your ideas

Rick

From: Albert William (Bill) Flounders <bill_flounders at berkeley.edu<mailto:bill_flounders at berkeley.edu>>
Sent: Thursday, December 1, 2022 4:43 PM
To: Collins, Deon <deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>>
Cc: Morrison, Richard H., Jr <rmorrison at draper.com<mailto:rmorrison at draper.com>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] BCL3 question

All,
Tom Britton has provided a wide range of excellent info to many of us.
I'm confident some supplier does recommend those storage limits and
large fabs have no trouble meeting them.
After review, we realized to meet these limits we would be disposing of
almost all of our gases - so we are going to keep drinking the old milk
regardless of what the carton says.

The one exception I will note is diborane - which is the gas with the shortest
recommended storage time on this list. We routinely had clogged injectors on
an lpcvd system delivering B2H6 and bottle change often solved the issue.
Polymerization of diborane is well documented and there's even a thread from
2012 on lab net discussing the issue.

Regards
Bill Flounders
UC Berkeley

On Thu, Dec 1, 2022 at 1:02 PM Collins, Deon <deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>> wrote:
I can tell you we personally had a BCL3 cylinder that was much, much, older than what is listed on their standards. It performed excellent till the day it was changed out three years ago. That cylinder is still being used on one of our cleanroom process tools with great results. Purity has an affect as well.

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Tom Britton
Sent: Wednesday, November 30, 2022 10:56 AM
To: Morrison, Richard H., Jr <rmorrison at draper.com<mailto:rmorrison at draper.com>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] BCL3 question

Hi Richard,

I got this a while back from I believe Air Liquide, but I’m not 100% positive of the source. Hopefully it helps.

Happy Holidays,

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208.890.1417
Office: 877.572.5515
Skype: tombrittoncsi
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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Morrison, Richard H., Jr
Sent: Wednesday, November 30, 2022 7:53 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] BCL3 question

HI everyone,

Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3 go bad? The gas cabinet scale is not in alarm.

Rick

Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461

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