[labnetwork] Plasma Etching/Deposition MAEBL Equivalent?

[Owain Clark]

I'd also be interested in such a thing... With perhaps a lean more towards the process and fundamental side vs applications

If you are after further education in etch process I would recommend the CEI lectures - https://www.cei.se/course-088-plasma-etching-for-cmos-technology-and-ulsi-applications-group.html I attended quite a while ago, the material was excellent and a lot of theory stretches to far more etch processes than just CMOS and ULSI applications.

O.

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of James Grant
Sent: 20 January 2022 07:56
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Plasma Etching/Deposition MAEBL Equivalent?

CAUTION: This e-mail originated outside the University of Southampton.
Hello,

Been tasked to try and find the most suitable plasma etching/deposition workshop/conference/event that is equivalent to MAEBL (https://maebl.org/<https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fmaebl.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760740141%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=SNXuhW7afLVsoNpYr6SU45cY6dKW%2BloqhkxlWLogy%2FI%3D&reserved=0>).

Never come across such an event in the plasma etching/deposition domain. What I find is that workshops/conferences are more focused on either an aspect of plasma etching/deposition (e.g. https://ald2022.avs.org/<https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fald2022.avs.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760740141%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=o42947insNLgQcC3kKbVJvtPRaOVnP%2F%2FNyqHarVTJqs%3D&reserved=0>) or are material/application specific (e.g. https://www.iwn2022.org/<https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.iwn2022.org%2F&data=04%7C01%7Codc1n08%40soton.ac.uk%7Ca86201a0165347a7c32908d9dc16ace7%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C637782812760896345%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C1000&sdata=%2FzAmQBWQ9cX5pkiVNvPcK5Sguh%2Ftu3728QsL2YzI5qA%3D&reserved=0>).

Cheers,

James

Dr. James Paul Grant
Research Engineer in Plasma Processing

Plasma Etch Group
 james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>

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