[labnetwork] Vacuum pump inlet trap for ALD tool

[Kevin M McPeak]

Dear Colleagues,

First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool.

As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD. We plan on avoiding chlorinated metalorganic precursors, so a stainless steel trap should be ok.

What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts?

Regards,
Kevin
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