[labnetwork] Vacuum pump inlet trap for ALD tool

Tue Jul 19 14:25:04 EDT 2022

I agree with Mitchell.  Dave Rolph has solved some problems for my customers with MultiTraps and those customers are still using them today.  He will tell you if the multitap will work for the ALD application based upon his experience, but I have never consulted him on this application.

However, in my experience, most fab customers have chosen to heat the forelines on ALD as opposed to adding traps prior to the pump to prevent things like TMA from depositing.  If your chlorinated material has a similar profile (remains in gas phase at pump operating temp), I think it would be worth investigating a foreline heat solution.  If you are doing ALD with DCS and Ammonia, there is a known solution adopted from LPCVD Nitride for a water cooled trap after the pump.  The total solution is heated foreline, hot running pump, heated exhaust line, then water cooled trap (collecting Ammonium Chloride).  The A25S is hot running, so you've got that part solved already.

The conundrum here is do you cool the gas stream using the trap and risk condensation in the pump or just try to keep in the vapor phase until it can be trapped or abated.  I think it may come down to the act materials you intend to be depositing.  It would be good to speak to a technical person from Edwards and Ebara to also get their perspective as they work very closely with ALD system OEMs.

Regards,

Rob Breisch
Vice President, Sales and Marketing
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     Trillium US, Inc.
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Mitchell Roselius
Sent: Tuesday, July 19, 2022 10:51 AM
To: Kevin M McPeak <kmcpeak at lsu.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Vacuum pump inlet trap for ALD tool

Hi Kevin,

We have used Mass Vac for several applications to protect our dry bed abatement canisters. I don't have experience using the Multi-Trap for ALD Vacuum pumps, but I have been very pleased with the Mass Vac systems.

I have worked with David Rolph when needing particle traps. I included his email and phone below in case you want to reach out to him.

Email: drolph at massvac.com<mailto:drolph at massvac.com>
Phone: 978-835-4666

Best Regards,

Mitchell Roselius
Eastern Regional Sales Engineer
Critical Systems, Inc.
Phone: 713.542.5436
Office: 877.572.5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>
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Note: 7 days per week technical support
Phone: 1-888-218-6308
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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Kevin M McPeak
Sent: Tuesday, July 19, 2022 11:48 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Vacuum pump inlet trap for ALD tool

Dear Colleagues,

First I want to thank all of you who had helpful suggestions regarding sealing our ALD tool.

As a follow-up, I want to purchase an inlet trap to protect the Ebara A25S dry pump we will be using for the ALD. We plan on avoiding chlorinated metalorganic precursors, so a stainless steel trap should be ok.

What are people using as traps to protect their ALD serving vacuum pumps? I am currently considering a Mass Vac MULTI-TRAP. Thoughts?

Regards,
Kevin
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