[labnetwork] Drytek Dry Pumps

[Mark Weiler]

Hi Dave,

We have a Drytek PS-80 pump that was backing our Versaline ICP Etcher and running BCl3 process gas for many years.  When it needed maintenance in 2016 we replaced it with an Edwards QDP-80, and it is now waiting for the day that it can return to pumping of the Versaline.  As far as performance I would rate the Edwards QDP and Drytek PS series comparable, but as far as ambient noise, I think the Drytek runs with less dB and also uses a little less N2.

Two pennies...

Best Regards,

Mark

________________________________________________________________

Mark Weiler
Manager, Equipment & Facilities
Bertucci Nanotechnology Laboratory
Eden Hall Nanofabrication Cleanroom
Carnegie Mellon University
P:	412-268-2471
F:	412-268-3497
http://www.nanofab.ece.cmu.edu




> On Jul 29, 2022, at 10:40 AM, Hollingshead, Dave <hollingshead.19 at osu.edu> wrote:
> 
> Hi all,
>  
> Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives.
>  
> Thanks,
> -Dave
>  
> Dave Hollingshead 
> Manager of Research Operations – Nanotech West Lab
> The Ohio State University
> Suite 100, 1381 Kinnear Road, Columbus, OH 43212
> 614.292.1355 Office
> hollingshead.19 at osu.edu <mailto:hollingshead.19 at osu.edu> osu.edu <http://osu.edu/>
>  
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