[labnetwork] Large-scale Nanopatterning

[Flückiger Philippe]

Dear Long,

We have an ASML DUV stepper connected to a TEL track coater running on 100mm wafers at your service.

With my very best regards,
Philippe

Dr Philippe Flückiger
Director of Operations
http://cmi.epfl.ch/
Phone +41 21 693 6695

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Brian Thibeault
Sent: samedi, 5 mars 2022 22:17
To: Michael Rooks <michael.rooks at yale.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Large-scale Nanopatterning

UCSB  has an ASML DUV stepper as well.  I'll contact you directly.

Brian Thibeault

On Sat, Mar 5, 2022, 12:38 PM Michael Rooks <michael.rooks at yale.edu<mailto:michael.rooks at yale.edu>> wrote:
Cornell CNF has an ASML stepper with 200 nm resolution.
https://www.cnfusers.cornell.edu/node/3

--------------------------------


On Sat, Mar 5, 2022 at 8:15 AM Chang, Long <lvchang at central.uh.edu<mailto:lvchang at central.uh.edu>> wrote:
Hello,

I need to print 300nm dots with center to center spacing of 500nm on a hexagonal lattice. Currently doing it with EBL, but need to do it faster and cheaper. What are my options? Can this be done with a Stepper somewhere?

Thanks,
Long

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220306/bc1484ab/attachment.html>