[labnetwork] photoresist spray coaters

Christian Spoerl christian.spoerl at idonus.com
Thu Mar 10 05:03:31 EST 2022


Dear Kyle,

have a look at
https://amcoss-systems.com/en/our-products/amr-semiautomatic-single-wafer-processing/ 

They have good spin- and spray-coater products & service.

Best regards
Christian

Christian Spoerl
Managing Director

Idonus Sarl
Rouges-Terres 61
2068 Hauterive / Neuchatel
Switzerland
tel: +41 32 724 44 40
email:christian.spoerl at idonus.com
www.idonus.com

On 10.03.2022 00:16, Kyle Keenan wrote:
> Hello All,
>
> I'm curious what experiences you may have with photoresist spray 
> coaters and if you have any makes/ models that you think are 
> worthwhile and won't break the bank. We have a Suss AS8 in our lab, 
> and it's given us a lot of trouble over the 8 years we've had it. We 
> also have a hard time getting reliable tech/field service support for 
> the system from the OEM, so I'd also be interested to know if anyone 
> can suggest an aftermarket vendor that services these systems that 
> might have more experience and/or availability.
>
> Thanks for your time.
>
> -- 
> Kyle Keenan
>
> Laboratory Manager
> Quattrone Nanofabrication Facility
> University of Pennsylvania
> P: 215-898-7560
> F: 215-573-4925
>
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