[labnetwork] PRS-2000 replacment

[Morrison, Richard H., Jr]

HI,

At Draper we use SVC-14 excellent results with AZ 46xx and 44xx and Shipley 1822 type resist, sometimes after long DRIE we use EKC-240.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Katharine Beach
Sent: Thursday, September 22, 2022 4:02 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] PRS-2000 replacment

We've been using PRS-2000 for our positive resist strip for years. Due to some supply chain issues, we are considering updating our supplied chemicals. I was wondering what photo resists stripers others are using and would recommend.

Thanks,
Katharine Beach
Lurie Nanofabrication Facility
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