[labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

[Jason Hrebik]

Hello Tuscan,

I hope all is well with you.  I received a copy of your e-mail below and wanted to chime in.

All non-magnetic targets that are used with a Mag Keeper source, do require the backing/ magnetic “keeper” for proper fit to the source.  For your Ti target, we can have the “keeper” added for you (we offer this service through our Materials group) OR we can provide the drawing showing the required hole pattern to be added locally and provide a keeper for you.

Can you confirm the target size (OD) you are using?

Thank you.

Best Regards,

Jason


Jason Hrebik
Senior Product Manager
Tel: +1 (412) 387-9116| Cell: +1 (412) 735-9863
| Email: jasonh at lesker.com 
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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Jason Rohr
Sent: Tuesday, August 15, 2023 4:42 PM
To: Richelson, Tucson <tucsonr at illinois.edu<mailto:tucsonr at illinois.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

Dear Tucson,

Will it sit nicely in the MagKeeper gun without sliding off? As far as I understand, if the target slides to the side then you'll get a short between the cathode and anode through the Ti target, resulting in your plasma extinguishing. If it doesn't slide, then it probably works; however, I would get a new target for long-term use.

I would be curious about the outcome.

Jason Röhr
UPenn QNF

On Tue, Aug 15, 2023 at 3:42 PM Richelson, Tucson <tucsonr at illinois.edu<mailto:tucsonr at illinois.edu>> wrote:
Hello all,

I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).

I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.

Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?


[cid:189fae7b9e84cff311]



Best,

Tucson Richelson

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