[labnetwork] Size GEN 2 ALD transfer recipe roadblock

[Fabien Dauzou]

Hello labnetwork,

We have an ALD chamber of approximately 0.2 m3 (0.6 x 0.6 x 0.6 m) and we have been transferring recipe from a much smaller chamber.
However, it is challenging to get a good sequential infiltration synthesis (SIS).
What have been the main roadblock when scaling up ALD chamber size to replicate recipe? Gas flow, pulse duration, pumping time, temperature?

Best regards, Bien cordialement,

Fabien Dauzou, Dipl. Ing.
Manager Processes at Edgehog
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