[labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller

[Jim Mitchell]

I have had a similar problem with a VAT controller. There is a battery
backed memory chip in the unit that needs to be replaced every couple of
years.  Once replaced you can recalibrate as per the manual.

Jim

On Mon, Dec 4, 2023, 3:42 PM Michael Call <michael.call at maine.edu> wrote:

> We have recently had a failure of the VAT valve PM-7 controller on our STS
> DRIE.  I've tried contacting SPTS, VAT and distributors for help.  The CM
> gauge read back always reads 100mTorr(maximum) at the controller.  I've
> measured and verified that the correct voltage to and from the CM gauge is
> correct.  So, I have verified that the problem is the VAT PM-7 control
> box.  Has anyone on  the list had a similar issue with the controller?  And
> is there someone still supporting the STS multiplex DRIE?
>
> Thank you
>
> --
> Mike Call
> CORE Facilities Manager
> University of Maine
> Coordinated Operating Research Entities Cleanroom/TASC
> ESRB Barrows Hall Room 294
> 207-581-3382
>
> [image: image.png]
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