[labnetwork] [EXTERNAL] Re: STS(SPTS) Multiplex DRIE VAT valve controller

[Rosendo Bindoy]

Hello Michael,

I agree with Jim. There is an SRAM on that unit that once battery is out everything in that memory will be wiped out. You need to replace battery periodically as per the manual.

https://www.lesker.com/newweb/valves/vat/files/283507.pdf?ls=1

Regards,
Rosendo

Rosendo Bindoy (he/his/him)
Equipment Specialist
KAUST Nanofabrication Core Lab
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Jim Mitchell <jimm at science.xyz>
Sent: Tuesday, December 5, 2023 3:42 AM
To: Michael Call <michael.call at maine.edu>
Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [EXTERNAL] Re: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve controller

I have had a similar problem with a VAT controller. There is a battery backed memory chip in the unit that needs to be replaced every couple of years.  Once replaced you can recalibrate as per the manual.

Jim

On Mon, Dec 4, 2023, 3:42 PM Michael Call <michael.call at maine.edu<mailto:michael.call at maine.edu>> wrote:
We have recently had a failure of the VAT valve PM-7 controller on our STS DRIE.  I've tried contacting SPTS, VAT and distributors for help.  The CM gauge read back always reads 100mTorr(maximum) at the controller.  I've measured and verified that the correct voltage to and from the CM gauge is correct.  So, I have verified that the problem is the VAT PM-7 control box.  Has anyone on  the list had a similar issue with the controller?  And is there someone still supporting the STS multiplex DRIE?

Thank you

--
Mike Call
CORE Facilities Manager
University of Maine
Coordinated Operating Research Entities Cleanroom/TASC
ESRB Barrows Hall Room 294
207-581-3382
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