[labnetwork] [EXTERNAL] Re: STS(SPTS) Multiplex DRIE VAT valve controller

[Michael Call]

Thank you all for the help.  We're sending it to Jeff Hawks for repair.

Mike

On Mon, Dec 4, 2023 at 11:46 PM Rosendo Bindoy <rosendo.bindoy at kaust.edu.sa>
wrote:

> Hello Michael,
>
> I agree with Jim. There is an SRAM on that unit that once battery is out
> everything in that memory will be wiped out. You need to replace battery
> periodically as per the manual.
>
> https://www.lesker.com/newweb/valves/vat/files/283507.pdf?ls=1
>
> Regards,
> Rosendo
>
> Rosendo Bindoy (he/his/him)
> Equipment Specialist
> KAUST Nanofabrication Core Lab
> ------------------------------
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Jim
> Mitchell <jimm at science.xyz>
> *Sent:* Tuesday, December 5, 2023 3:42 AM
> *To:* Michael Call <michael.call at maine.edu>
> *Cc:* Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
> *Subject:* [EXTERNAL] Re: [labnetwork] STS(SPTS) Multiplex DRIE VAT valve
> controller
>
> I have had a similar problem with a VAT controller. There is a battery
> backed memory chip in the unit that needs to be replaced every couple of
> years.  Once replaced you can recalibrate as per the manual.
>
> Jim
>
> On Mon, Dec 4, 2023, 3:42 PM Michael Call <michael.call at maine.edu> wrote:
>
>> We have recently had a failure of the VAT valve PM-7 controller on our
>> STS DRIE.  I've tried contacting SPTS, VAT and distributors for help.  The
>> CM gauge read back always reads 100mTorr(maximum) at the controller.  I've
>> measured and verified that the correct voltage to and from the CM gauge is
>> correct.  So, I have verified that the problem is the VAT PM-7 control
>> box.  Has anyone on  the list had a similar issue with the controller?  And
>> is there someone still supporting the STS multiplex DRIE?
>>
>> Thank you
>>
>> --
>> Mike Call
>> CORE Facilities Manager
>> University of Maine
>> Coordinated Operating Research Entities Cleanroom/TASC
>> ESRB Barrows Hall Room 294
>> 207-581-3382
>>
>> [image: image.png]
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>>
>

-- 
Mike Call
CORE Facilities Manager
University of Maine
Coordinated Operating Research Entities Cleanroom/TASC
ESRB Barrows Hall Room 294
207-581-3382

[image: image.png]
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