[labnetwork] Calibration for thermocouplers for Jipelec JetFirst300

[Hüseyin Yagci]

Hello,
We have an ECM Jipelec JetFirst 300 RTA, capable of going to 1200C in our clean room. The system has a central thermocoupler (K-type TC) for calibration and readout, three peripheral read-only TCs and a pyrometer for high temperatures. The pyrometer reading is referenced to the central TC reading. Couple of weeks ago we noticed our contact performances varied across wafers and decided to change the central TC. The newly put TC reads up to 30C lower than the previous one, as well as all the peripheral TCs. The company does not seem to be checking the uniformity between the TCs they send, and we basically do not if the new TC is reading correctly or not. We are looking for a way to calibrate them in-house, without getting NPL involved. Did anybody encounter a similar problem before?

Many thanks,
Huseyin Bilge Yagci
Cardiff University
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