[labnetwork] [External] Question about DC sputtering of zinc

[Vlahakis, James]

Hi Sandra, a few years ago we allowed Zn deposition in our "dirty" sputter tool without a heated platen. Consider the attached vapor pressure v Temp chart - at the temps seen in our tool the vapor pressure is below the system base pressure. Since that time we've noted no significant changes in base pressure and other users haven't complained about their films being lower quality.

Please take this with a grain of salt - Zn dep is not very common here, just a few times per year. In addition, our users are not fabricating CMOS devices, almost all are biomed focused these days

jim


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Malhotra, Sandra Guy
Sent: Monday, January 30, 2023 4:40 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [External] [labnetwork] Question about DC sputtering of zinc

Howdy All from AggieFab,
We have a user who requested permission to sputter zinc in our shared Lesker PVD75 DC sputtering tool.  On the Lesker website, there is the following note:

"This material has a relatively high vapor pressure at low temperatures which can cause ppm level contamination in the chamber and subsequent films. Careful consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition."

I'd like to ask the group if they allow zinc depositions in their shared tools if they follow it by a thorough paste with another material, like Ti? Or if this material is prohibited because it is problematic.

Thanks in advance for any inputs you may have.

Best,

Sandra G. Malhotra, Ph.D.  |  Technical Lab Manager

AggieFab Nanofabrication Facility
https://aggiefab.tamu.edu/
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199  |  sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu>
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TEXAS A&M UNIVERSITY | FEARLESS on Every Front


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