[labnetwork] Question: adhesion of metal to BPDA/PPD polyimide

[Beaudoin, Mario]

Dear Networkers,

I'm new to polyimide processing.  We have a student project that 
requires deposition of metal on polyimide (BPDA/PPD PI-2600 series from 
HD microsystems).  We tried liftoff with depositon of Ti/Pt by Ebeam.  
Despite a 1min O2 plasma, albeit at low power, the metal was peeling 
off.  Moreover, the photoresist was also peeling off from the 
polyimide.  Does anyone have a good working recipe for metalization of 
polyimide?

Thanks,

Mario

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