[labnetwork] Treating silane exhaust from PECVD

[Mitchell Roselius]

Hi Hadi and Joe,

I am the Eastern Sales Engineer for Critical Systems Inc, and we partner with Jupiter Scientific.

For PECVD processes with lower flow rates, we recommend a dry bed scrubber since it has the highest abatement efficiency of any technology (Thermal, Wet, etc.) and typically the lowest cost of maintenance and utilities. We have worked with several universities, like Iulian at University of Delaware, and have extensive experiences with CVD and RIE applications.

For a brief overview, I have attached the cutsheet for our Callisto Scrubber which is the most common system used by universities. I would be happy to go over our options and discuss if any make sense for your facility. I am always available by phone or email if you have any questions.

Mitchell Roselius
Eastern Regional Sales Engineer
Critical Systems, Inc.
Phone: 713.542.5436
Office: 877.572.5515
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>
[cid:image001.png at 01D9272F.4C0B5EA0]
Note: 7 days per week technical support
Phone: 1-888-218-6308
Email: Fieldservices at criticalsystemsinc.com

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Joseph Losby
Sent: Thursday, January 12, 2023 4:35 PM
To: Hadi Esmaeilsabzali <hadi_esmaeilsabzali at sfu.ca>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Treating silane exhaust from PECVD

Hi Hadi and everyone,  I am interested in what abatement solutions others use as well.   We are currently looking at Jupiter Callisto dry bed scrubber systems for our PECVD and ICP-RIE processes.

Cheers,
Joe
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Hadi Esmaeilsabzali <hadi_esmaeilsabzali at sfu.ca<mailto:hadi_esmaeilsabzali at sfu.ca>>
Sent: January 12, 2023 12:35 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Treating silane exhaust from PECVD

[△EXTERNAL]

Dear Colleagues,

For those who run PECVD at their facilities, I am wondering how you process the exhaust from your systems.

We used to treat the PECVD exhaust along with that of the SiNx tube furnace through a TPU. We have recently decommissioned our furnace and TPU as they were too costly to run and are looking at alternative exhaust options for the PECVD only. We use our PECVD tool for oxide and nitride deposition, and it's worth noting that it only uses silane (no ammonia).

Some colleagues had mentioned that they don't use a TPU/scrubber and send the process waste to the building exhaust (untreated). Given that our PECVD processes use a relatively small silane flow (~30 sccm for up to 30 mins per run each week - all max values) and it is significantly diluted, this sounded a practical option. I am trying to see if others have tried or can comment on this approach, particularly for a silane-based PECVD process. Aside from the flammability concerns, we are also aware of the potential oxide buildup in the exhaust system over time.

I appreciate it if you share other (cost-effective) suggestions you might have for us!

Thanks,
Hadi


Hadi Esmaeilsabzali, PhD

Nanofabrication Group Manager, 4D LABS

Simon Fraser University

8888 University Dr., Burnaby, B.C. V5A 1S6
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