[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

[Martin, Michael]

Hi Aju,
   At Louisville for our ICP RIE we have BCl3 and Cl2 sensors in the cabinet, one ambient near the tool, and one in the gas pod exhaust.  On our PECVD for SiH4 we have 2 ambients, one in the gas pod and of course one at the cabinet.

-Michael
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Sent: Friday, January 13, 2023 12:48 PM
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Subject: [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring


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Hi all,



We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and Silane. The exhausts from the pumps are connected to a scrubber and ph neutralization/acid waste system.



I am reaching out to get some advice on the specific locations of the Honeywell Midas sensors that we use, to detect any gas leak at the etchers and toxic gas monitoring system. We have sensors at the gas cabinets and ambient sensors at the tools.

However, there seems to be a disagreement between our design team and our EHS unit. The design team recommends having the sensors in the gas pods, where the leaks are most likely to occur. EHS would like to have the ambient sensors at the tools, in the breathing zone areas. As per local code requirements, sensors in the gas pods satisfies the safety requirements.



I would like to know what your set-up of the sensor locations for similar instruments is that you may have in your facility.

Any insights based on experience will be super helpful.



Thanks so much,

Aju





Aju Jugessur Ph.D. IEEE Sr. Member

Director, Colorado Shared Instrumentation

in Nanofabrication and Characterization (COSINC) Facility

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University of Colorado Boulder | College of Engineering & Applied Science

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