[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

[Peder Lenvik]

At our site we have sensors in the exhaust duct of the gas cabinets as well
as ambient. Our gas cabinets are in remote gas cabinet rooms. At the tool
we have sensors in the exhaust of the gas boxes (where the MFCs are
located) and system enclosures, and ambient sensors around the tools.

If your gas cabinets are in the service chase next to the tool it would
just be one sensor in the “general” exhaust duct (serving the gas cabinet,
gas box of MFCs, and system enclosure) and one ambient/area sensor.



*Peder Lenvik*



Sr. Facilities Lead



Electrical and Computer Engineering

E.S.B. Bldg. #225, Room 1109F

University California Santa Barbara, Santa Barbara, Ca. 93106



Cell: (805)698-7461



plenvik at ucsb.edu



http://www.nanotech.ucsb.edu





*From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Aju
Jugessur
*Sent:* Friday, January 13, 2023 9:48 AM
*To:* Fab Network <labnetwork at mtl.mit.edu>
*Subject:* [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas
monitoring



Hi all,



We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and
Silane. The exhausts from the pumps are connected to a scrubber and ph
neutralization/acid waste system.



I am reaching out to get some advice on the specific locations of the
Honeywell Midas sensors that we use, to detect any gas leak at the etchers
and toxic gas monitoring system. We have sensors at the gas cabinets and
ambient sensors at the tools.

However, there seems to be a disagreement between our design team and our
EHS unit. The design team recommends having the sensors in the gas pods,
where the leaks are most likely to occur. EHS would like to have the
ambient sensors at the tools, in the breathing zone areas. As per local
code requirements, sensors in the gas pods satisfies the safety
requirements.



I would like to know what your set-up of the sensor locations for similar
instruments is that you may have in your facility.

Any insights based on experience will be super helpful.



Thanks so much,

Aju





Aju Jugessur Ph.D. IEEE Sr. Member

Director, Colorado Shared Instrumentation

in Nanofabrication and Characterization (COSINC) Facility

Member of Inclusive Culture Council (ICC)

*University of Colorado Boulder | **College of Engineering & Applied
Science*

4001 Discovery Drive, N360G SEEC *|* Boulder, CO 80303*|* *P:* 303.735.5019

E-mail: aju.jugessur at colorado.edu

Personal Zoom link: https://cuboulder.zoom.us/my/*ajugessur*
<https://cuboulder.zoom.us/my/ajugessur>

www.colorado.edu/facility/cosinc

(MBA candidate, CU, Class of 2023)



[image: signature_804197951]




*Signature-Strengths: Focus, Activator, Futuristic, Strategic,
Achiever(CliftonStrengths)*
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