[labnetwork] Heidelberg Instruments stage interferometer laser replacement

[Huoth, Kalvin - 0835 - MITLL]

Hi Greg, 

 

We had our MLA150 Renishaw RLU10-A3 A3 replaced in Nov. Was your laser intensity measurement in spec? Have you checked the focus rails for 405 and 375 lens, overtime they will dry up and cause the laser to lose power during exposure. The RL10 swap unit was easy but you will need MLA Support to walk you through software side to establish communication. 

 

Below is HIMT Evan Cooper’s contact 

Email: evan.cooper at himt.us <mailto:evan.cooper at himt.us> 
Phone: (781) 428-6684

 

 

Best regards, 

Kalvin Huoth

MIT Lincoln Laboratory

Lexington MA 02421

Office 781-980-0388

 

 

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Greg Holloway
Sent: Friday, January 13, 2023 10:57 AM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Heidelberg Instruments stage interferometer laser replacement

 

Hello Everyone,

 

Thanks to everyone who responded to my question. To quickly summarize the results, it looks like about half of the people who responded, either with DWLs or MLAs, have done the replacement themselves using units purchased directly from Renishaw for some cost savings. This has been very informative, and will guide us on how we proceed. Thanks again to everyone who provided input.

 

Best,

-Greg

 

On Wed, Jan 11, 2023 at 3:03 PM Greg Holloway <greg.holloway at uwaterloo.ca <mailto:greg.holloway at uwaterloo.ca> > wrote:

Hello,

 

We have an MLA150 from Heidelberg instruments which we've been running for ~5 years. At the last annual PM, we were told by Heidelberg that the stage interferometer laser was approaching its end of life, as the signal is getting weaker. Heidelberg quoted us the cost for a refurbished laser unit, and we were surprised by how expensive it was. I was wondering how owners of other Heidelberg Instruments tools have proceeded in this situation? Does everyone just get the unit directly from Heidelberg, or has anyone attempted any thriftier alternatives such as repairing or replacing themselves?

 

The laser unit is a Renishaw RLU10-A3-A3.

 

Best,

-Greg Holloway

QNFCF: University of Waterloo

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