[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

[Collins, Deon]

We are currently revamping our abatement systems at HMNTL. Al of our current equipment goes to CDO's. We are replacing the CDO's with a wet scrubber for our etch tools, a single dry scrubber for our PECVD and another Dual dry scrubber for our MOCVD in GaAr mode(to the wet scrubber in GaN mode). A prefilter on the PECVD is highly recommended due to the amount of solid waste material you will gather int the exhaust. While not dangerous the powder is a pian to clean up and can clog the dry scrubber if not addressed.

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aju Jugessur
Sent: Friday, January 13, 2023 11:48 AM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

Hi all,

We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and Silane. The exhausts from the pumps are connected to a scrubber and ph neutralization/acid waste system.

I am reaching out to get some advice on the specific locations of the Honeywell Midas sensors that we use, to detect any gas leak at the etchers and toxic gas monitoring system. We have sensors at the gas cabinets and ambient sensors at the tools.
However, there seems to be a disagreement between our design team and our EHS unit. The design team recommends having the sensors in the gas pods, where the leaks are most likely to occur. EHS would like to have the ambient sensors at the tools, in the breathing zone areas. As per local code requirements, sensors in the gas pods satisfies the safety requirements.

I would like to know what your set-up of the sensor locations for similar instruments is that you may have in your facility.
Any insights based on experience will be super helpful.

Thanks so much,
Aju


Aju Jugessur Ph.D. IEEE Sr. Member
Director, Colorado Shared Instrumentation
in Nanofabrication and Characterization (COSINC) Facility
Member of Inclusive Culture Council (ICC)
University of Colorado Boulder | College of Engineering & Applied Science
4001 Discovery Drive, N360G SEEC | Boulder, CO 80303| P: 303.735.5019
E-mail: aju.jugessur at colorado.edu<mailto:aju.jugessur at colorado.edu>
Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur
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(MBA candidate, CU, Class of 2023)

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