[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

[Nava Ariel-Sternberg]

Hi Aju, all,

Our configuration is similar to Cornell's. We have sensors at exhausted
enclosures and we have ambient sensors, located by the tools, where the
users are breathing. The ambient sensors are connected to the fire alarm and
building evacuation is happening when these are triggered. Exhausted
enclosure alarms evacuate the lab only. 

Hope this helps,

Nava

 

Dr. Nava Ariel-Sternberg

Senior Director of CNI Labs

Columbia University

CEPSR/MC 8903 

530 west 120th st. NY

NY 10027

Office: 212-8549927

Cell: 201-5627600

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aju Jugessur
Sent: Friday, January 13, 2023 12:48 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

 

Hi all,

 

We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 and
Silane. The exhausts from the pumps are connected to a scrubber and ph
neutralization/acid waste system.

 

I am reaching out to get some advice on the specific locations of the
Honeywell Midas sensors that we use, to detect any gas leak at the etchers
and toxic gas monitoring system. We have sensors at the gas cabinets and
ambient sensors at the tools.

However, there seems to be a disagreement between our design team and our
EHS unit. The design team recommends having the sensors in the gas pods,
where the leaks are most likely to occur. EHS would like to have the ambient
sensors at the tools, in the breathing zone areas. As per local code
requirements, sensors in the gas pods satisfies the safety requirements.

 

I would like to know what your set-up of the sensor locations for similar
instruments is that you may have in your facility.

Any insights based on experience will be super helpful.

 

Thanks so much,

Aju

 

 

Aju Jugessur Ph.D. IEEE Sr. Member

Director, Colorado Shared Instrumentation 

in Nanofabrication and Characterization (COSINC) Facility

Member of Inclusive Culture Council (ICC)

University of Colorado Boulder | College of Engineering & Applied Science

4001 Discovery Drive, N360G SEEC | Boulder, CO 80303| P: 303.735.5019

E-mail:  <mailto:aju.jugessur at colorado.edu> aju.jugessur at colorado.edu

Personal Zoom link: https://cuboulder.zoom.us/my/
<https://cuboulder.zoom.us/my/ajugessur> ajugessur

www.colorado.edu/facility/cosinc <http://www.colorado.edu/facility/cosinc> 

(MBA candidate, CU, Class of 2023)

 



 

Signature-Strengths: Focus, Activator, Futuristic, Strategic, Achiever
(CliftonStrengths)

 

 

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