[labnetwork] (2) MRL Industries Cyclone LPCVD Systems soon to be for sale on govdeals.com

[Aebersold, Julia]

Hello everyone.  We will soon be posting two MRL Cyclone LPCVD systems for sale on govdeals.com.  I have a ton of pics, so reach out to me if you have an inquiry.  The system is not functional and is in pieces.

System 1
MRL Industries Cyclone 430 Tube Furnace System
Vintage: 1999
Wafer Size: 150 mm
Tube 1 (top): Boron Diffusion
Tube 2: Dry/Wet Oxidation
Tube 3: POCL3
Tube 4: Annealing
Condition: Used, Not functional, in pieces
Cyclone Furnace System, Part #6500817330 R00, Serial #: 065008010000911
Load Station, Model #481, Part #: 6540943162 Serial #: 065408012000911

System 2:
MRL Industries Cyclone LH Tube Furnace System
Vintage: 1995 (refurbished in 2002)
Wafer Size: 100 - 150 mm
Tube 1 (top): Wet Oxidation
Tube 2: Nitride
Tube 3: Polysilicon
Tube 4: Low Temp Oxide
Condition: Used, Not functional, in pieces
Cyclone Furnace System, Part #650-814214, Serial #: 065000112970903
Load Station, Model #HLFS 48-1, Part #:654-939836, Serial #:71524


Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

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