[labnetwork] TMAH alternatives

[Michael Rooks]

An alternative for HSQ development is described in
Yang and Berggren, J. Vac. Sci. Technol. B 25(6), Nov/Dec 2007 2025

1 liter water + 40 g NaCl + 10 g NaOH

--------------------------------
Michael Rooks
nano.yale.edu


On Thu, Jun 15, 2023 at 5:21 PM Hathaway, Malcolm R <
hathaway at cns.fas.harvard.edu> wrote:

> Hello Labnetworkers,
>
> Has anyone tried one of the TMAH substitutes that have become available?
>
> How do they work?  Are your users satisfied with their results?
>
> For background, TMAH (tetramethylammonium hydroxide) is widely used in
> commercial resist developers (3%) and for HSQ developing (25%).  In its 25%
> concentration, TMAH is a potent contact neurotoxin, which is fatal roughly
> 75% of the time, for exposures greater than 7.5% of body area.  Nasty stuff.
>
> Several companies now have safer alternatives available, which we'd like
> to try out, such as:
>
>  Envure 3330 (Sachem Chemical),
>
> E-Grade THEMAH SLM ((hydroxyethyl) methylammonium hydroxide, from Huntsman
> Chemical), and
>
> Novo-safe SE-33 (ethyl tri-methy ammonium hydroxide from Transene).
>
> We are particularly interested in using one of these as an HSQ developer,
> so we can do away with 25% TMAH.
>
> Any experiences, good or bad, will be most welcome.
>
> Thanks,
>
>
> Mac Hathaway
> Senior Process and Systems Engineer
> Harvard Center for Nanoscale Systems
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