[labnetwork] High temperature oxidation/anneal furnaces

Fri May 5 16:24:31 EDT 2023

Hi Labnetwork:

MIT.nano is looking to explore oxidation/anneal capabilities at 1500C (possibly even up to 2000C) for 6 and 8" wafers - to go beyond our regular 1100C furnaces range.

Does anyone have similar systems in their lab that they can recommend?  Both small batch or single wafer would be fine.

Thanks!

-Jorg
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