[labnetwork] Gas cabinets for Ammonia and 2-5% Silane

[Dennis Schweiger]

Kevin,

We have an assortment of both Air Products (AP), and Applied Energy Systems
(AES) gas cabinets, mini gas cabinets, and valve manifold boxes.  Orur AP
cabinets are nearing their end of life for the automatic controls, and our
intent when they expire is to replace them with controls and panels from
AES.

Make sure that whatever you purchase, you can "talk" to it with external
equipment.

I've personally worked with AES for over 25 years, both at the University,
and on the outside.  You won't find a better company to work with.

If you want to take a look at a variety of different hardware, and
installations, you're more than welcome to come up for a visit.

Dennis Schweiger
University of Michigan/LNF
Facilities Manager

734.647.2055 Ofc


On Wed, Nov 22, 2023 at 8:12 AM Kevin M McPeak <kmcpeak at lsu.edu> wrote:

> Dear Colleagues,
>
> The LSU Nanofab will install an Oxford PECVD system for SiO2, SiNx, and
> a-Si deposition next year. We are getting quotes for ammonia and silane gas
> cabinets in preparation for the PECVD.
>
> So far, we have received quotes for Ammonia and Silane gas cabinets from
> SDC, SilPac, Matherson, AirGas, and Critical Systems.
>
> Are we missing anyone? We have discussed the details of the installation
> with our local safety folk but input from the list of recommended gas
> cabinet manufacturers would be most appreciated. We are especially
> interested in reconditioned systems if they exist. Thanks!
>
> Regards,
> Kevin
>
> --
> Kevin M. McPeak
> Associate Professor | LSU Dept. of Chemical Engineering
> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
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