[labnetwork] companies that refill ALD precursor cylinders

[Martin, Michael]

Several people asked about cleaning the old cylinder.  We have not had to cross that bridge yet.  When we filled up on TDMAS we happened to have a new bubbler (the type with a conflat flange) that is NOT DOT certified and intended for user refills.
   When we purchased the TDMAS it was from Sigma https://www.sigmaaldrich.com/US/en/product/aldrich/759562 and was only $177/25 g.  I see it is currently listed as $980/25 g but I'm not logged into the site.
Tris(dimethylamino)silane packaged for use in deposition systems 15112-89-7<https://www.sigmaaldrich.com/US/en/product/aldrich/759562>
Tris(dimethylamino)silane (N,N,N,N,N, N-Hexamethylsilanetriamine) | Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films | Buy chemicals and reagents online from Sigma Aldrich
www.sigmaaldrich.com
The only quality control we did afterwards was depositions followed by careful ellipsometer measurements.

Regards,
   Michael
________________________________
From: Nathanael Sieb <sieb at 4dlabs.ca>
Sent: Tuesday, October 24, 2023 12:09 PM
To: Martin, Michael <michael.martin at louisville.edu>
Cc: Hadi Esmaeilsabzali <sabzali at 4dlabs.ca>
Subject: Re: [labnetwork] companies that refill ALD precursor cylinders


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Hi Michael,

I'm curious about this option.  We've considered it since we do have an N2 glovebox here.  How did you clean your previous cylinders before filling them?  Did you do any quality control after installing it in the ALD?


Thanks,
Nathanael


On 2023-10-23 2:26 p.m., Martin, Michael wrote:
Hi Kyle,
   One thing you might consider is DIY.  We reached out to our chemistry department and found someone with a positive pressure N2 glove box and ended up filling our TDMAS (Tris(dimethylamino)silane) ourselves.  It was a little bit nerve-wracking but saved soooo much money.
  P.s. should anyone need ALD as a service, our tool is definitely underutilized.  It is remote PEALD with SiO2, Al2O3, ZnO, and TiO2

Regards,
  Michael
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu><mailto:labnetwork-bounces at mtl.mit.edu> on behalf of Kyle Keenan <kckeenan at seas.upenn.edu><mailto:kckeenan at seas.upenn.edu>
Sent: Monday, October 23, 2023 1:30 PM
To: Lab Network (labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>) <labnetwork at mtl.mit.edu><mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] companies that refill ALD precursor cylinders


CAUTION: This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.

Hello All,

A number of you have responded to my email, which is greatly appreciated. however, many of you have suggested Strem, the very company with which I am having an issue, as you will see if you reread the original message. If you have any suggestions other than Strem, I would certainly like that information.

Thank you, once again.
Kyle

On Wed, Oct 18, 2023 at 12:56 PM Kyle Keenan <kckeenan at seas.upenn.edu<mailto:kckeenan at seas.upenn.edu>> wrote:
Hi Folks,

Can anyone recommend a company that will refill used ALD precursor bottles with the original chemical? We normally use Strem for this purpose, but I was just informed that they have put a stop of indeterminate length to accepting used cylinders from customers, while they review their procedures. It was suggested that I check back in a month to see where things stand, but we cannot afford to wait that long, and I would really like to avoid that extra thousands of dollars it would cost to have to buy replacement precursors in new bottles (which have a nearly one month lead-time through Strem).

I look forward to your replies.

Thank you,
--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925


--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925



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Nathanael Sieb
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