[labnetwork] Wafer Bond Alingment

Katharine Beach beach at umich.edu
Wed Sep 13 08:47:40 EDT 2023


Following up on the bonding question from a few weeks ago. Does anyone have
an alignment/bonding system that they would recommend, and/or would willing
provide feedback on? We have been looking at the Suss, EVG and AML systems.

Thanks,
Katharine Beach


-- 

Katharine Beach

Research Engineer

Lurie Nanofabrication Facility

University of Michigan

beach at umich.edu <vpray at umich.edu>

(734) 255-9487 <7347638105>

Calendly <https://calendly.com/beachlnf>

1301 Beal Avenue, 1241 EECS Building
Ann Arbor, MI 48109-2122

LNF.umich.edu <http://www.lnf.umich.edu/>

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<https://www.linkedin.com/company/lurie-nanofabrication-facility>
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