[labnetwork] HMDS lifetime in YES oven

Lewis,William blewis at eng.ufl.edu
Fri Apr 12 15:06:36 EDT 2024


Hi Chao,

The HMDS in our YES Oven is many many years old and no issues at all with the process.  As long as it’s not exposed to air it should be fine.

Best,
Bill Lewis
Research Service Center
University of Florida
1041 Center Dr
Gainesville, FL 32611
walewis at ufl.edu<mailto:walewis at ufl.edu>
3five2-258-zero5zero7
https://rsc.aux.eng.ufl.edu/




From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Zhichao Wang
Sent: Monday, April 8, 2024 5:40 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] HMDS lifetime in YES oven

[External Email]
Dear Lab Network,

I was wondering how long the lifetime is for the HMDS in the YES oven. On the note from the YES's website, it says " If the HMDS is more than a year old, it should probably be replaced". I would assume the "year" here starts from the HMDS manufactured date, which is the shelf life for a brand new bottle of HMDS. Do you guys have experience on using the HMDS for extended time (like 6+ months) after the expiration date? Please let me know your thoughts and suggestions. Many thanks!


Best,
Chao



--
[Image removed by sender.]
Zhichao "Chao" Wang, Ph.D.
Lithography Engineer
UDNF
University of Delaware
Pronouns: He/Him/His
------------------------
Office Number:(302) 831-4839
221 Academy St.,RM170
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