[labnetwork] HMDS lifetime in YES oven

Mark Cooper markc at exper-tech.com
Fri Apr 12 17:47:18 EDT 2024


YES is still active and in business in Fremont Ca.

It may be worth a call to check in with them

3178 Laurelview Ct.
Fremont CA 94538
+1-510-954-6889 (main)<tel:+1-510-954-6889>
888-937-3637 (US toll-free)<tel:888-937-3637>


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Lewis,William
Sent: Friday, April 12, 2024 12:07 PM
To: Zhichao Wang <zhichaow at udel.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] HMDS lifetime in YES oven

Hi Chao,

The HMDS in our YES Oven is many many years old and no issues at all with the process.  As long as it’s not exposed to air it should be fine.

Best,
Bill Lewis
Research Service Center
University of Florida
1041 Center Dr
Gainesville, FL 32611
walewis at ufl.edu<mailto:walewis at ufl.edu>
3five2-258-zero5zero7
https://rsc.aux.eng.ufl.edu/




From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Zhichao Wang
Sent: Monday, April 8, 2024 5:40 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] HMDS lifetime in YES oven

[External Email]
Dear Lab Network,

I was wondering how long the lifetime is for the HMDS in the YES oven. On the note from the YES's website, it says " If the HMDS is more than a year old, it should probably be replaced". I would assume the "year" here starts from the HMDS manufactured date, which is the shelf life for a brand new bottle of HMDS. Do you guys have experience on using the HMDS for extended time (like 6+ months) after the expiration date? Please let me know your thoughts and suggestions. Many thanks!


Best,
Chao



--
[Image removed by sender.]
Zhichao "Chao" Wang, Ph.D.
Lithography Engineer
UDNF
University of Delaware
Pronouns: He/Him/His
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Mark Cooper

Expert Semiconductor Technology, Inc.

Phone: (831) 439-9300

Fax: (831) 439-8139

This email message is for the sole use of the addressee(s) and may contain Expertech confidential and legally privileged information. Access, review, use, disclosure or distribution of this email by anyone other than the intended addressee is unauthorized and prohibited. If you are not the intended recipient, please notify the sender immediately and destroy all paper and electronic copies of the original message and any attachments.
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