[labnetwork] Feedback on ovens for curing resist

[Clifford F Knollenberg]

Hi All,

We're looking to replace our resist curing ovens.  We're looking for ovens that are fast ramping and small enough to be stacked.  I've surveyed some of the options including: Despatch, Binder, Yamato, Shel Labs, and Eurotherm, but the choice is not obvious.  Anyone have any experience (good or bad) or advice (likes or ones to avoid)?

Regards,

Cliff


Cliff Knollenberg

Processing Engineer - Lithography

Stanford Nanofabrication Facility

650-721-1274

[Image]



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