[labnetwork] AFMs?

[S. J. Ben Yoo]

Hi, All,

I am looking for very functional but inexpensive AFMs.

We are about to purchase a CMP and need to characterize the wafer smoothness down to rms < 2 nm.

We also need to characterize optical waveguide ridge sidewall smoothness down to rms < 4 nm.

Wafer sizes are typically 100 mm -200 mm.

Can anyone recommend a good system for below 100k?

I saw this website and has all kinds of info but not sure what I should look into.

https://www.afmworkshop.com/afm-products/price-list?srsltid=AfmBOoplueAwT1fUBp6PWJkju_VdBlgZufV7BkHaWzsY7m6bhugMzwZ6
Atomic Force Microscope Price List
afmworkshop.com

Best,

-Ben
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